Next Generation Fabrication

How Helium Is Used in Semiconductor Fabrication

Helium plays a crucial role in semiconductor manufacturing due to its inert nature, high thermal conductivity, and non-reactivity, making it ideal for maintaining clean, controlled environments and precise process conditions.

Key Uses of Helium in Semiconductor Fabrication

1. Plasma Etching & Deposition

Helium is used as a carrier gas in plasma etching and chemical vapor deposition (CVD) processes.

Maintains plasma stability and improves etching accuracy and uniformity for tiny features in advanced nodes (e.g., 5nm, 3nm).

2. Cooling of Wafers and Equipment

Used in electrostatic chucks to cool wafers during high-temperature processes like etching or ion implantation.

Its high thermal conductivity makes it ideal for precise temperature control on wafer surfaces.

3. Leak Detection

Mass spectrometer helium leak detection ensures vacuum integrity in cleanrooms and high-vacuum chambers.

4. Purge and Inert Atmosphere

Used to purge systems of contaminants and maintain cleanroom-grade environments during sensitive operations.

Current Market Size (2024)

The global helium market is about $6 billion.

Semiconductor manufacturing consumes ~10–15% of global helium.

That’s approximately $600 million to $900 million per year.

Semiconductor fabrication is among the top three industrial consumers of helium, along with MRI and aerospace.

Future Market Size and Growth (2025–2030)

Semiconductor Industry Trends:

Semiconductor demand is growing rapidly due to:

AI, 5G, EVs, IoT, cloud computing

Advanced lithography (EUV), shrinking nodes (3nm, 2nm)

Global semiconductor market expected to grow from ~$600 billion in 2024 to $1 trillion+ by 2030

Helium Forecast for Semiconductors:

2024, ~12% of global helium use, $720M–$900M

2027, ~13–15%, $1.0B+

2030. ~15–18%, $1.2B+-$1.5B

Challenges and Trends

Opportunities:

Growing chip complexity increases helium reliance.

Expansion of fab capacity globally (TSMC, Intel, Samsung, etc.)

Strategic reserves and long-term supply deals becoming more common.

Constraints:

Helium shortages can slow fab production or increase costs.

Efforts are being made to reclaim and recycle helium within fabs.